Oberflächeninspektion bis in den Nanometerbereich


... according to standard

Using the technology of the structured illumination Confovis measuring systems are particularly suitable for precise measurements of surface roughness, which were analysed profil-based (2D) according to DIN ISO 4287/4288 as well as area-based (3D) according to DIN ISO 25178.

Focus variation


... and structured illumination

Flank angles up to 80° and the 3D analysis of finest surfaces by
means of confocal measurements. Use the advantages of 
both measurement methods in one system - for different 
measuring tasks e.g. form and roughness determination in 
tool making and mechanical engineering

3D wafer microstructures measured; automated wafer inpsection


... automatically measured

The ConfoDisc CL300 measuring system the automatic and
three-dimentional measurement of through-silicon vias (TSV)
and bumps. Nikon handling periphery such as wafer
loader can be easily integrated. Control and data
transfer are carried out via a SECS/GEM

3D surface metrology provided by Confovis

Quick, precise and conforming to standards: Confovis offers optical 3D measuring technology for reliable process controls and detailed quality inspections in a wide range of industries.

With cutting tools, the surface quality in the sub-micrometer range is crucial to the service life of the tools and the precision of the parts to be produced. Especially in the production of functional surfaces such as bearing surfaces, deviations in the nanometre range are decisive for the service life and reliability of the parts. Using Confovis measuring systems, you can measure both tools and functional surfaces of components with nanometre precision.

Artefact-free measuring

The patented functional principle of structured illumination of Confovis offers new approaches in confocal measurement technology. The latest generation of devices guarantees an isotropic resolution of edge angles up to 40°. Even at structures with an edge angle of up to 90°, there are no artefacts, whereby a minimum lateral resolution of 300 nm is achieved. In this connection, the photon noise of better than 3 nm constitutes the limit of the axial resolution. The Confovis measuring process uses LEDs und thus reduces Speckle and coherence effects that often limit the accuracy of measuring results with white light interferometers and laser scanning microscopes.

Measurement of a 56nm depth standard

The confovis measuring process uses LEDs, thus reducing the effects mentioned. Measuring artefacts, the main cause for the restriction of the confocal measuring technology applied to determine roughness values of unknown surfaces, are reduced considerably. Together with the actually recorded measured values, this allows traceable roughness measurements.


Quality inspection of additive manufactured components

The surface of such additive manufactured components often has a high roughness.To monitor the surface quality throughout the entire process chain, innovative 3D measurement technology from Confovis is used...


Integrated measurement systems at the Control 2015

True to the motto "flexible in design, high accuracy in application", Confovis is displaying their expanded product range of highly integrated measurement solutions at Control 2015.


Successful certification according to ISO 9001:2008 standard

Confovis is setting a course for entry into the tool and machine engineering markets, as well as into the automotive sector. With certification pursuant to ISO 9001, the business is going a stop further in the direction of...


Tool manufacturers benefit from combined measuring techniques

The latest generation of measuring devices from confovis GmbH combines focus variation and confocal measuring processes for the first time in order to analyse the micro-topography and roughness of components and tools such...

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SEMICON Europa 2015
October 6-8, 2015
Dresden, Germany
Hall 1, Booth 1460

ISO 9001 Certification

Successful audit: Since December 2014 Confovis is certified acc. to ISO 9001 >


Here you will find application examples and typical measuring tasks.

Here you will find selected customers from various industry and research sectors. 

confovis GmbH
Hans-Knöll-Str. 6
D-07745 Jena, Germany

Phone  +49 (0) 3641 27 410 - 00
Fax      +49 (0) 3641 27 410 - 99