SIM & Focus Variation

SIM & Focus Variation

confovis · Applications · SIM & Focusvariation

Unlock Precision and Flexibility in Inspection and Metrology with Confovis' SIM and Focus Variation Technologies

At Confovis, we specialize in cutting-edge optical measurement solutions for the ever-evolving demands of modern industries such as integrated photonics, MEMS, power semiconductors, and 3DIC. Our Structured Illumination Microscopy (SIM) and Focus Variation (FV) technologies provide a complete solution for Automated Optical Inspection (AOI) and metrology.

By combining SIM and FV in a single platform, Confovis offers a unique and powerful tool for manufacturers looking to enhance their metrology and defect inspection processes. Whether you’re working with complex materials, reflective surfaces, or rough textures, Confovis’ technologies are designed to provide precise, reliable, and fast results.

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What is Structured Illumination Microscopy?

Structured Illumination Microscopy (SIM) is the innovative confocal measurement method patented by Confovis. By projecting a grid structure onto the sample with two alternating LED light sources (structured illumination), phase-shifted images are produced. These images are processed with advanced computational methods to generate maps of the surface topography to nanometer precision.

Key Benefits of Structured Illumination Microscopy

What is Focus Variation?

Focus Variation (FV) is an optical measurement technique that excels at capturing 3D surface topography, particularly for rough, non-reflective, or textured surfaces. By moving the lens along the vertical axis and capturing images at different focal planes, FV creates a highly accurate 3D map of the surface. The system identifies the point at which each surface feature is in sharpest focus, and from this, the surface height is determined.

Key Benefits of Focus Variation

Why Combine SIM and Focus Variation at Confovis?

The Confovis advantage lies in the integration of SIM and Focus Variation into one single measurement platform. This unique combination gives you the ability to perform both high-resolution lateral imaging and precise vertical measurement in one tool, covering the full spectrum of surface inspection needs.

Data Fusion: Konfokale Mikroskopie und Fokusvariation

Advantages of Combining SIM and FV

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