SIM & Focus Variation
- Comprehensive 3D Imaging: SIM provides ultra-detailed lateral imaging, while Focus Variation captures steep flank information.
- Versatility: The Confovis dual-technology platform can handle any surface, whether it is smooth, rough, reflective or transparent.
- Artifact-Free Data: Both SIM and FV ensure artifact-free measurements even on the most challenging surfaces (e.g., thin films).
confovis · Applications ·
At Confovis, we specialize in cutting-edge optical measurement solutions for the ever-evolving demands of modern industries such as integrated photonics, MEMS, power semiconductors, and 3DIC. Our Structured Illumination Microscopy (SIM) and Focus Variation (FV) technologies provide a complete solution for Automated Optical Inspection (AOI) and metrology.
By combining SIM and FV in a single platform, Confovis offers a unique and powerful tool for manufacturers looking to enhance their metrology and defect inspection processes. Whether you’re working with complex materials, reflective surfaces, or rough textures, Confovis’ technologies are designed to provide precise, reliable, and fast results.
Structured Illumination Microscopy (SIM) is the innovative confocal measurement method patented by Confovis. By projecting a grid structure onto the sample with two alternating LED light sources (structured illumination), phase-shifted images are produced. These images are processed with advanced computational methods to generate maps of the surface topography to nanometer precision.
- Vertical resolution: 3 nm.
- Lateral accuracy (e.g. on Line/Space structures): < 5nm
- Fast Acquisition: 60 optical sections per second.
- Area-based image: 6,6 MP per optical section.
- Independent of material: Even difficult material combinations, such as gold on polymer, chrome on glass, oxide layers on metal, etc. can be measured even if the material combinations are not known.
- Versatility: A wide range of surfaces can be measured, including shiny, matte, and transparent materials.
Focus Variation (FV) is an optical measurement technique that excels at capturing 3D surface topography, particularly for rough, non-reflective, or textured surfaces. By moving the lens along the vertical axis and capturing images at different focal planes, FV creates a highly accurate 3D map of the surface. The system identifies the point at which each surface feature is in sharpest focus, and from this, the surface height is determined.
- Illumination with a ring light allows measuring steep flanks independent of the numerical aperture (NA) hence of the magnification.
- Non-contact measurement ensuring no damage to the surface.
- Single micrometer-level precision for height measurements.
The Confovis advantage lies in the integration of SIM and Focus Variation into one single measurement platform. This unique combination gives you the ability to perform both high-resolution lateral imaging and precise vertical measurement in one tool, covering the full spectrum of surface inspection needs.
- Comprehensive 3D Imaging: Use SIM for ultra-detailed lateral imaging, while FV captures steep flank information.
- Versatility: Whether you are working with smooth, rough, reflective, or transparent surfaces, Confovis’ dual-technology platform can handle it all without the need for multiple tools.
- Speed and Efficiency: With fast measurement cycles and the ability to switch between techniques, our systems are optimized for high-throughput production environments.
- Artifact-Free Data: Both SIM and FV ensure artifact-free measurements even on the most challenging surfaces, such as thin films, multi-layered materials, and hard-to-measure textures.
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