Whitepaper
Full 3D Defect and Anomaly Inspection for Inline Semiconductor Manufacturing
Ensure the highest quality and efficiency in your semiconductor manufacturing with innovative 3D defect and anomaly inspection.
In the dynamic world of semiconductor manufacturing, precise defect detection and anomaly inspection are crucial for product quality and economic profitability.
This whitepaper provides a comprehensive insight into the latest technologies and strategies for automated optical 3D inspection, especially for inline manufacturing. Learn how innovative solutions like the WAFERinspect AOI system can optimize your production processes and increase yield.

- Gain detailed insights into AOI, the use of AI in defect detection, and the advantages of structured illumination microscopy for more accurate results.
- Discover versatile inspection solutions specifically for compound semiconductors, micro-lenses, MEMS, and Advanced Packaging.
- Learn how 100% optical inline inspection can revolutionize your manufacturing processes, reduce defect rates, and improve your competitiveness.
This whitepaper highlights our advanced AOI and metrology strategies and the technical highlights of the WAFERinspect tools. Application examples show how a wide variety of substrates and materials can be accurately inspected and how the integration of AI optimizes defect detection and classification. Learn more about the patented Structured Illumination Microscopy (SIM) for artifact-free measurements of demanding surfaces and the importance of inline operation in semiconductor manufacturing.
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