Optical 3D surface measurements systems

confovis ⋯ Measurement systems

Based on different industry requirements, Confovis develops optical 3D measurement systems for measurement and evaluation of surface characteristics. The optical measuring systems are tailored exactly to the requirements of the respective industries; their modular design makes them adaptable to customer requirements in terms of size, features and technology. Depending on the configuration, the optical measuring systems are available as manual, semi-automatic or fully automatic systems. As stand-alone systems, their design and available interfaces make them suitable for integration into existing production-related series measurement systems. Surfaces, microstructures etc. are measured with the appropriate measurement software from Confovis and subsequently evaluated by the established evaluation software such as MountainsMap© or GOM©. In terms of quality assurance, this results in significant time savings, high data quality and reliable measurement data for evaluation. Unlike the conventional confocal measuring methods, the optical measuring method patented by Confovis, supply artifact-free measurement data even of most complex surfaces (such as reflecting, transparent or diffuse layers).

WAFERinspect

Reliable 3D & 2D measurements for the semiconductor industry

LEADinspect

Measurement of micro and macro lead in one measuring procedure

TOOLinspect

Analysis of various surfaces

ROLLERinspect

Automatic defect detection and defect inspection

OEM module

The Confovis measuring method for roughness and micro contour measurements

The structures of certain surface features require a full analysis by optical measurement systems. In combination with confocal microscopy, surfaces can be analyzed in their entirety with regard to microgeometry, roughness measurement and isotropy and are traceable to the common roughness standards DIN EN ISO 4287 and 13565. This means, for example, that artifact-free measurements can be made even of the most challenging surface combinations.

An example for this is contacts (mostly gold) of a USB stick, which are embedded in insulation material (mostly plastic), which puts other 3D measuring systems to the test due to the different materials. With the optical 3D measuring systems from Confovis such difficult combinations of material and surface can be handled without the use of filters. The same applies to extremely hard layers (e.g., DLC coatings or amorphous carbon layers such as ta-C), which can be detected at every process step. Due to the frequently random distribution of the structural elements of these surfaces, the use of Confovis measuring systems supply higher parameter stability than tactile devices.

Whether in production, clean rooms, test laboratories or in research & development: the Confovis measurement systems are easy to integrate, simple to operate and provide measuring results with an accuracy down to the single-digit nanometer range even in harsh environments. Besides, measurements are made at high speed, which saves valuable time.

No use of noise filters, complete transparency of raw data
Measurement on reflecting, transparent and diffuse surfaces
Roughness measurement traceable to any roughness standard
Simple handling: 3 clicks for the measurement, 1 click for the evaluation
Short measuring time: very much like a profile device
Automation and QA database interfaces

Detailed surface measurements are not yet standard in measuring machines or inspection systems, so that roughness or waviness must be measured at no less than two different stations. This requires higher input and therefore longer measuring time.

Simple integration into coordinate measuring machines (CMM) is ensured by the robust design (no moving parts). This eliminates the need for transfer times and also ensures the uniformity of data transfer.

Optical measurement systems

Optical measurement systems for surface analysis of nanometer accuracy

Confovis measuring systems

Optical 3D measurement of most difficult surfaces

Optical 3D measurement with Confovis

The optical measurement systems of Confovis can be integrated