MEMS (micro-electro-mechanical systems) are combining a variety of technologies. Due to the new challenges for the connected world the number of MEMS needed for 5G, autonomous driving, Internet of Things, microfluidics and mobile devices will explode over the next years. MEMS are one of the mega trends for the industry. MEMS are produced on wafers with diverse materials ranging from silicon and glass to epoxy and metals. Thus, often they contain non-standard material combinations and are more challenging for process control tools.
Due to the ability of Confovis to measure 3D surfaces independent from the material the WAFERinspect measuring systems are the future process control and metrology tools.