- A single wafer inspection system for various tasks: automated optical inspection & metrology
- Flexibility: rapid adaptation of the system to new requirements in the field of defect inspection
- High accuracy and repeatabilities when performing 2D and 3D measuring tasks
At Confovis, we offer a range of WAFERinspect tools tailored to meet the diverse needs of wafer inspection and metrology, from manual control to fully automated operation.
Explore our wafer inspection systems below and discover the ideal solution for your R&D and production needs.
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More InformationOur semi-automated version balances manual control with recipe-driven automated inspection and metrology processes, allowing operators to manage critical steps while automating repetitive tasks. This wafer inspection system is ideal for industries that require flexibility, precision, and efficiency without automated wafer handling and host control.
- Semi-automated recipe-based inspection and metrology
- Customizable workflow
- Ideal for mid-sized production environments
WAFERinspect AOI provides host-controlled, fully automated optical inspection and metrology capabilities for high-volume production lines. This system ensures automated handling, consistent, reliable, and high-speed inspection, ideal for manufacturing where time and accuracy are critical.
- Fully automated inspection for high throughput
- Host interface through SECS/GEM and GEM 300
- High-precision defect detection
- Streamlined integration with existing production lines
The DUAL version of the WAFERinspect AOI system incorporates two sensors. This ensures a comprehensive inspection process especially for 3D features such as bumps or micro-lenses, making it ideal for complex wafer structures and advanced applications.
- Dual sensors for comprehensive 3D inspection
- Optimized for 3D metrology in high-precision applications
- Ideal for any kind of new materials in PIC and Advanced Packaging
Take your wafer inspection system to the next level with the Confovis Multisensor Upgrade. This add-on allows you to equip your WAFERinspect system with additional sensors, enabling simultaneous measurements. With the multisensor upgrade, you can extend the range of detectable defects and gain a more comprehensive understanding of your wafers, increasing the overall efficiency of your production line.
- Enhanced defect detection with multiple sensors
- Extended range of detectable defects
- Compatible with WAFERinspect systems
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