Oberflächeninspektion bis in den Nanometerbereich

ROUGHNESS MEASUREMENTS

... according to standard

The patented confocal measuring technique from Confovis uses LED light and acquires areal data of the surface topography. It is particularly suitable for high-precision measurements of roughness. In contrast with laser scanning microscopes, there are no speckle or coherence effects so that roughness can be evaluated in unfiltered state (according to VDA 2006) in accordance with the standards DIN EN ISO 4287/88, DIN EN ISO 13565 and DIN EN ISO 25178

Focus variation

FOCUS VARIATION

... and confocal measurements

Use the advantages of both measurement processes in one system - e.g. for form as well as roughness determination in tool making and mechanical engineering. Measure reliably flank angles up to 80° with focus variation and finely finished surfaces with the highly precise confocal measurement technology.

3D wafer microstructures measured; automated wafer inpsection

WAFER MICROSTRUCTURES

... automatically measured

2D structures such as CD (line/space, diameter), overlay, vias,
plated through-holes and also 3D structures such as
layer thickness, angle and surface topography can
be measured and evaluated with Wafer Inspect.
The Confovis inspection systems can be
integrated in fully automatic wafer
handling systems.

 

 

Optical measurement for 3D surface analysis provided by Confovis

Fast, precise and traceable to standards: Confovis offers optical 3D measurement for the reliable imaging of the surface for different applications and industries.

The areal confocal measurement according to the patented principle of “structured illumination microscopy“ (SIM) yields areal images of surfaces with an accuracy down to the single-digit nanometer scale. The roughness is evaluated by the MountainsMap software according to established standards. The areal measurement of Micro-geometries such as, e.g., on tools, is performed by the tried-and-tested focus variation procedure. Cutting edges are evaluated by parameters such as Sγ and Sα using the software of IFW Hannover. The combination of confocal and focus variation measurement in a common coordinate system is unique and takes advantage of the benefits of both measuring techniques in a 3D point cloud.

Strong Partnerships

Confovis cooperates with established companies from industry and research

To ensure, for the customer, maximum transparency of the generation of the measuring points Confovis is partnering with renowned companies. In microscopy, the partner companies are Nikon and Olympus. In measurement evaluation we cooperate with Digital Surf, whose established MountainsMap software is used for evaluating roughness parameters, for example. Confovis focuses on its core competency: measuring technology by means of patented confocal techniques and the proven focus variation.  Read more >

06.09.2018

Verschleißmessung an Zerspanungswerkzeugen

Der Messtechnik-Spezialist Confovis GmbH aus Jena präsentiert seine Messstrategie für die Erfassung von Verschleiß an Zerspanungswerkzeugen, die konfokal gemessene Daten mit der Fokusvariation fusioniert. Das Ergebnis ist...


20.04.2017

Measurement technology allows for rapid process monitoring in diode production

Optical measurement technology supports quality control at the laser diode manufacturer Lumics GmbH...


03.04.2017

Tool Inspect measurement system at the Hanover Fair 2017

Confovis presents its Tool Inspect optical measurement system for quick and automated measurement of tools and micro-components at the Hanover Fair 2017. The measurement system offers two measurement procedure in one...


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Events

AMB STUTTGART
18 - 22 Sep 2018
Stuttgart, Germany

Exhibitor; Hall 7, Stand 7D55

SEMICON EUROPA
13 -15 Nov 2018
Munich, Germany

Exibitor

confovis GmbH
Ernst-Ruska-Ring 11
D-07745 Jena, Germany

Phone  +49 (0) 3641 27 410 - 00
Fax      +49 (0) 3641 27 410 - 99