The areal confocal measurement according to the patented principle of “structured illumination microscopy“ (SIM) yields areal images of surfaces with an accuracy down to the single-digit nanometer scale. The roughness is evaluated by the MountainsMap software according to established standards. The areal measurement of micro-geometries such as, e.g., on tools, is performed by the tried-and-tested focus variation procedure. Cutting edges are evaluated by parameters such as Sγ and Sα using the software of IFW Hannover. The combination of confocal and focus variation measurement in a common coordinate system is unique and takes advantage of the benefits of both measuring techniques in a 3D point cloud.