The Confovis WAFERinspect AOI system combines various inspection tasks on structured and unstructured wafers in a single system. By combining automatic optical inspection (AOI) and metrology, Confovis AOI offers solutions for defect inspection and classification as well as 3D and 2D measurements (wafer level metrology) for MEMS, advanced packaging, RDL, bumps, etc..

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confovis GmbH

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AOI Systems