
Full 3D defect and anomaly inspection for inline semiconductor manufacturing
Compound semiconductors are found in a growing range of technology applications. The compound semiconductor market is a multi-billion market which is expected to grow by one order of magnitude within the next decade.
To keep up with the pace and to remain competitive, it is of primary importance for semiconductor manu- facturers to increase their yield while reducing costs. Moreover, the constantly increasing requirements concerning components’ reliability make an optical inspection necessary for all critical processing steps.